INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Handbuch (Seite 221)

Index - 1
IP
N 07
4-
44
6-
P5
A
XTC/3 Gebrauchsanleitung
Index
A
Akustische Rückmeldung 4-22
ALARMS 3-23
Anstiegszeit 4-4
Antwort Paket 5-7
AT-Schnitt 8-2
AUDIO FEEDBACK 4-22
Aufdampfen/Abätzen 4-20
Auflösung für Schichtdicke 1-6
Autostart 3-25
AUTOSTART NEXT LAYER 4-20
Auto-Zero 3-7
Aux I/O Connector 2-12
B
BAUD RATE 4-24
BCD mode 3-27
Befehl Paket 5-6
Belichtungabschaltzeit 4-23
Benutzerschnittstelle 1-6
Bin mode 3-27
Blendenverzögerung 4-14
C
Checksum 5-7
Clear
lock code 3-34
user-programmed parameters 3-34
co-deposition 2-5
Communications
network protocol 5-3
Control
Delay 3-26
Loop Theory 8-10
CONTROL DELAY TIME 4-15
CONTROL GAIN 4-11
COUNTS 4-10
Crucible 4-11
Crucible Switching 3-27
Crucible Valid 2-12
crystal replacement 6-20
standard and compact 6-21
Crystal Sensor Emulator 6-26
Crystal12 3-30 , 3-32
CrystalSix 3-29 , 3-32 , 6-25
CrystalTwo 3-28 , 3-32
D
Data Log 3-34
DEAD TIME 4-12
Declaration Of Contamination 1-5
DELAY OPTION 4-14
DENSITY 4-12
density
determination 7-1
DEP/ETCH MODE 4-20
Deposition Rate 4-6
DHCP 3-35
Diagnostics 3-11 , 6-6
Dichte 4-12
Dickenscherungsmodus 8-2
Dickensollwert 4-6
Dual Head 3-31
E
Earth Ground 1-3
Einbausatz 1-12
Enddicke 4-6
Error Code 5-8
Ethernet Schnittstelle 4-25
F
Fehler Code 5-8
Fehlermeldungen 6-1
Fehlersuche 6-1
Film Aufstellung 4-2
Film Definition 4-3
FILM NUMBER 4-6
film parameters 3-8
Film Select (nur XTC/3S) 4-23
Film Select Option 2-11
FILM TO RUN 4-19
Film(e) Definieren 4-1
FILTER 4-22
FINAL THICKNESS 4-6
Firmware 6-6
Frequenzgenauigkeit 1-6
G
General Parameter Konfigurieren 4-1
H
hardware handshaking 5-1